| 发明名称 |
Post-cleaning chamber seasoning method |
| 摘要 |
A method for seasoning a process chamber is disclosed. The seasoning method includes providing a seasoning film on the interior surfaces of a process chamber, typically after cleaning of the chamber.
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| 申请公布号 |
US2005214455(A1) |
申请公布日期 |
2005.09.29 |
| 申请号 |
US20040810912 |
申请日期 |
2004.03.26 |
| 申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. |
发明人 |
LI LIH-PING;LU YUNG-CHEN |
| 分类号 |
C23C16/00;C23C16/44;(IPC1-7):C23C16/00 |
主分类号 |
C23C16/00 |
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