| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a reticle cover that can relieve a pressure difference during charging/discharging of air and wherein a material on a space formed by a reticle and the reticle cover is only a filter material. <P>SOLUTION: The detachable reticle cover for protecting the pattern surface of a reticle is comprised of a frame and a filter, wherein a plane in contact with a space formed by the reticle and the reticle cover is formed by a filter. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
