发明名称 METHOD FOR MANUFACTURING SINGLE CRYSTAL OF GROUP III ELEMENT NITRIDE, AND REACTION VESSEL USED THEREFOR
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing efficiently a group III element nitride, e.g. gallium nitride or aluminum nitride, with high quality. SOLUTION: A group III element such as gallium or aluminum and an alkali metal such as sodium are put into a crucible in a nitrogen gas atmosphere and thermally melted under pressure, thus growing a single crystal. The crucible used here is (A) one made of a nitrogen-free material having a melting point or decomposition temperature of 2,100°C or higher or (B) one made of at least one material selected from the group consisting of rare earth oxides, alkaline earth metal oxides, W, SiC, diamond, and diamond-like carbon, this material preferably being, for example, Y<SB>2</SB>O<SB>3</SB>. The above yielded single crystal, as illustrated with a photograph (A) of the figure, is colorless and transparent and has a high quality and a maximum diameter of 2 cm or more. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005263535(A) 申请公布日期 2005.09.29
申请号 JP20040076129 申请日期 2004.03.17
申请人 JAPAN SCIENCE & TECHNOLOGY AGENCY 发明人 SASAKI TAKATOMO;MORI YUSUKE;YOSHIMURA MASASHI;KAWAMURA SHIRO;UMEDA HIDEKAZU
分类号 C30B29/38;C30B11/06;(IPC1-7):C30B29/38 主分类号 C30B29/38
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