| 摘要 |
The electrostatic chuck 101 of the present invention, where pairs of electrodes 3 a/ 3 b, 4 a/ 4 b and 5 a/ 5 b to which voltages are applied are embedded in the main body 1 , and where a substrate 110 is placed and held on the surface of the main body 1 , includes a first electrode group constituted of one pair or more of electrodes 3 a/ 3 b arranged in a center region 41 inside the main body 1 , and a second electrode group constituted of one pair or more of electrodes 4 a/ 4 b and 5 a/ 5 b arranged in outer peripheral portions 42 and 43 surrounding the center region 41.
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