| 摘要 |
<P>PROBLEM TO BE SOLVED: To maximize the effective area of an element by connecting basic patterns of an arrayed element with a smooth light intensity distribution at their contiguous parts. <P>SOLUTION: This three-dimensional shape forming mask uses a mask formed by arranging at least two or more basic patterns obtained by linearly arranging mask patterns of size smaller than a resolution limit and giving a distribution of ratios of areas of opening parts of the patterns while a projection exposure device is used for exposing operation, repetition intervals of the basic patterns on the straight line where the patterns of sizes less than the resolution limit are arranged being an integral multiple of the repetition intervals of the patterns smaller than the resolution limit. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
