| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical component having a water-repellent film provided with ultraviolet laser irradiation durability. <P>SOLUTION: The optical component is mounted on a substrate stage PST of a projection exposure system EX, illuminates a mask M by an exposing beam EL, and transfers the pattern of the mask on a substrate P held on the substrate stage by a projection optical system PL through a liquid 1. The optical component includes a light irradiation surface irradiated by the exposing light, a bonding fine particle layer formed on the light irradiation surface which is composed of a fine particle layer made up of at least one among silicon dioxide, magnesium fluoride, and calcium fluoride, and a water-repellent film which is formed on the surface of the bonding fine particle layer and is composed of an amorphous fluorine resin. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
