| 摘要 |
PROBLEM TO BE SOLVED: To provide a mechanism improved for adjusting the resonance frequency in a polarizing mirror for vibrating a mirror board supported by a support member via torsional beams reciprocatingly, with the torsional beams as the rotary shafts. SOLUTION: Movement suppressing members 203 and 204, formed of silicon boards integrally with the torsional beams 102 and 103, are provided. By applying voltage between the movement suppression members and the torsional beams 102 and 103, the movement suppression members are deformed or displaced to the side of the torsional beams to pressurize the side surfaces of the torsional beams from both their sides. With the increase in the deformation or displacement of the movement suppression members by boosting applied voltage, the pressurized range of the torsional beams is expanded gradually from the side of the connecting part of the torsional beams with an upper frame 104 toward the opposite side. With the expansion of the pressurized range, the effective length of the torsional beams is reduced so that the resonance frequency is raised. COPYRIGHT: (C)2005,JPO&NCIPI
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