| 发明名称 |
PROBE DEVICE CAPABLE OF BEING USED FOR PLURAL KINDS OF TESTERS |
| 摘要 |
<p>A probe device (10) has an insert ring (14) and a base card holder (13) that match a pogo ring (15) and probe card (17) for plural kinds of testers. The base card holder (13) is formed to have a larger diameter than a card holder (20) for the probe card (17). A conversion ring (16) links the connection between the card holder (20) and the base card holder (13).</p> |
| 申请公布号 |
WO2005091006(A1) |
申请公布日期 |
2005.09.29 |
| 申请号 |
WO2005JP04698 |
申请日期 |
2005.03.16 |
| 申请人 |
TOKYO ELECTRON LIMITED;NOGUCHI, MASAYUKI |
发明人 |
NOGUCHI, MASAYUKI |
| 分类号 |
G01R1/06;G01R1/073;G01R31/28;H01L21/66;(IPC1-7):G01R31/28 |
主分类号 |
G01R1/06 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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