| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical image measuring device capable of determining effectively a direct-current component of a heterodyne signal comprising background light of interference light. <P>SOLUTION: This optical image measuring device 1 is equipped with an interference optical system for splitting a light beam from a light source 2 into signal light S and reference light R by a beam splitter 5, shifting the frequency of the reference light R by a frequency shifter 6, and superimposing the signal light S via a measuring object O with the reference light R reflected by a mirror 7 by the beam splitter 5 to generate the interference light L; beam splitters 11, 12 for splitting the interference light L into interference lights L1, L2, L3; shutters 31, 32, 33 which are intensity modulation means for modulating the intensity of each interference light with a prescribed period; CCDs 21, 22, 23 for receiving each interference light subjected to the intensity modulation, and outputting electric signals; and a signal processing part 60 which is an operation means for operating the intensity of the direct-current component corresponding to the background light of the interference light L based on the outputted electric signal. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
