| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser marking apparatus capable of marking a plurality of fine patterns with high accuracy over a wide range on a workpiece. <P>SOLUTION: In the laser marking apparatus 1, a laser beam L emitted from a laser generator 5 is reflected on the reflection mirrors 11 and 13 of a scanner 10 for fine patterns, then reflected on the reflection mirror 21 of a positioning scanner 20, and finally converged on the workpiece 50 through an fθlens 30. In this instance, the reflection mirrors 11 and 13 of the scanner 10 for fine patterns are designed to be rotated around mutually independent rotary axes by galvano meters 12 and 14, the prescribed fine patterns are marked in arbitrary minute sections 50a on the workpiece 50. In addition, the reflection mirror 21 of the positioning scanner 20 is designed to be given two-dimensional rotary freedom by a gonio-stage 22. Thus, the region in which the fine patterns are marked is positioned in the arbitrary minute sections 50a on the workpiece 50 by the scanner 10 for fine patterns. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
