| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for an elastic wave device, capable of forming an electrode on a piezoelectric substrate using different methods, such as deposition, and forming the electrode at a comparatively elevated temperature, and improving the adhesiveness of the electrode to the piezoelectric substrate. SOLUTION: The manufacturing method for a elastic wave device comprises a process of forming an inorganic material film 2 on a piezoelectric substrate 1, a process of forming a photoresist layer on the inorganic material film 2, a process of patterning the photoresist layer by photolithography after formation of the photo resist layer, to form a photoresist pattern, a process of etching the inorganic material film 2, a process of forming the patterned inorganic material film 2A, a process of forming a metal film 4 for electrode formation over the whole surface after removing the photoresist pattern 3, and a process of lifting-off the patterned inorganic material film 2A and the metal film on the inorganic material film 2A, to form an electrode 4A. COPYRIGHT: (C)2005,JPO&NCIPI
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