| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface treatment apparatus and a surface treatment method for enabling the execution of a surface treatment on an article by plasma discharging under an ambient pressure or a pressure close to it in a stable and consecutive manner. SOLUTION: In the surface treatment apparatus, a plasma is generated by an electric discharge from an applying electrode 3 under a pressure close to an ambient temperature, and a transfer part 2 bearing the article 1 is passed through a discharge section to execute the surface treatment on the article 1. The periphery of the article 1 is encircled with a height adjusting part 2b as thick as the article 1. The transfer part 2 for transferring the article 1 consists of a transfer base 2a made of a conductive material, and the height adjusting part 2b mounted on the transfer base 2a. COPYRIGHT: (C)2005,JPO&NCIPI
|
