| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface grafting material useful as a pattern forming material that can form a polymer pattern with high resolution, and a graft pattern forming method that can form a polymer graft pattern with a high resolution using the material. SOLUTION: A substrate is formed which comprises surface grafting polymer chains directly bonded, each at one of the two terminals, to the substrate surface by covalent bonding, wherein the surface grafting polymer chains are covalently bonded to the substrate surface via optically cleavable positions. COPYRIGHT: (C)2005,JPO&NCIPI |
