| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and method for liquid crystal alignment such that an alignment device which has its constitution simplified and is made small-sized is provided and an alignment processing direction can be determined with high precision. SOLUTION: A display part of a substrate is irradiated with laser light and the angle of rotation of the substrate is recognized from the shape of its diffraction spot. Based upon the recognized angle of rotation, the substrate is rotated to a specified angle. Then the substrate is irradiated with an ion beam under a vacuum and the alignment processing is performed. The laser irradiation may be either in an atmosphere or under a vacuum, but when the laser irradiation is carried out in an atmosphere, the substrate is carried in a vacuum tank for the ion beam irradiation. The alignment processing may be rubbing for light irradiation. Further, the direction of the alignment processing may be rotated instead of rotating the substrate. COPYRIGHT: (C)2005,JPO&NCIPI
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