发明名称 Anti-vibration mount apparatus, exposure apparatus, and device manufacturing method
摘要 An anti-vibration mount apparatus which suppresses vibration of a structure is disclosed. The apparatus comprises a gas spring which supports the structure, and a controller which controls an internal pressure of the gas spring. The controller comprises a primary chamber which communicates with a pressure source, a secondary chamber which communicates with the gas spring, a back-pressure chamber which communicates with the secondary chamber, a back-pressure control mechanism which has a nozzle communicating with the back-pressure chamber and a flapper facing the nozzle and controls a pressure in the back-pressure chamber via control of exhaust from the back-pressure chamber by changing a gap between the nozzle and the flapper, and a pressure control mechanism which controls a pressure in the secondary chamber via one of gas supply from the primary chamber to the secondary chamber and gas exhaust from the secondary chamber to outside caused in accordance with a pressure difference between the back-pressure chamber and the secondary chamber. The flapper has a tapered portion facing the nozzle, and the nozzle has a bore widened toward an outlet of the nozzle.
申请公布号 US2005211515(A1) 申请公布日期 2005.09.29
申请号 US20050088757 申请日期 2005.03.25
申请人 CANON KABUSHIKI KAISHA 发明人 HATA TOMOYASU;YANAGISAWA MICHIO;MAEDA TAKASHI;SHIBAYAMA TAKASHI
分类号 G03F7/20;F15B5/00;F16F15/02;F16F15/027;F16M7/00;H01L21/027;(IPC1-7):F15B5/00 主分类号 G03F7/20
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