发明名称 Method for manufacturing a MOS transistor
摘要 A method for manufacturing a MOS transistor integrated into a chip of semi-conductive material comprising a first and a second active region which extend from the inside of the chip to a surface of the chip. The method comprises the steps of: a) forming a layer of insulating material on the surface of the chip and depositing a layer of conductive material on said insulating layer, b) defining an insulated gate electrode of the transistor, from said superimposed insulating and conductive layers, c) defining, from said superimposed insulating and conductive layers, an additional structure arranged on a first surface portion of the first active region, and d) placing between the insulated gate electrode and the additional structure a dielectric spacer placed on a second surface portion of the first active region.
申请公布号 US2005214999(A1) 申请公布日期 2005.09.29
申请号 US20050133706 申请日期 2005.05.19
申请人 STMICROELECTRONICS S.R.L. 发明人 MOSCATELLI ALESSANDRO;CROCE GIUSEPPE
分类号 H01L21/8238;(IPC1-7):H01L21/823 主分类号 H01L21/8238
代理机构 代理人
主权项
地址