Probing apparatus for measuring electrical characteristics of integrated circuit, has signal contact tip for selective engagement with signal contact pad of device under test and coupled to impedance matching resistor

摘要

The apparatus has an impedance matching resistor (70) with a port coupled to a modulation signal port of a bias tee (64) to receive a signal part and another port. A signal contact tip selectively engages with a pad (46) of a device under test and connects to the latter port of the resistor. A termination resistor (74) linked to the signal port of another bias tee (66) terminates a signal path of a signal component.