AG ALLOY FILM AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an Ag alloy film which can yield an Ag alloy film pattern having high reflectivity and low resistance and having higher adhesion and a method for manufacturing the same. SOLUTION: The method has first and second thin film forming processes by sputter deposition and a simultaneous etching process for the first and second thin films and manufactures the thin films under the conditions to make the reflectivity of the second thin film higher than the reflectivity of the first thin film and to lower the resistance. The first thin film is sputter deposited by using an Ag alloy target prepared by adding 0.1 to 4.0wt% Au and 0.5 to 10.0wt% Sn to Ag and the second thin film is sputter deposited by using an Ag alloy target prepared by adding 0.1 to 4.0wt% Au and≤2.0wt% Sn to the Ag. COPYRIGHT: (C)2005,JPO&NCIPI