发明名称 |
Morphology and Spectroscopy of Nanoscale Regions using X-Rays Generated by Laser Produced Plasma |
摘要 |
A system and method is disclosed for generation of a nanoplasma and/or nanofluorescence. The system includes an emissions source of soft x-rays. The emissions source can include a laser system as an energy source and target material that acts as a radiation source when illuminated by the laser system. The system further includes focusing optics particularly suited for manipulation of wavelengths associated with x-rays. The focusing optics can focus the x-rays onto a desired target so that a nanoplasma or nanofluorescent spot can be formed to have a diameter of less than 200 nm. Radiation from the nanoplasma or nanofluorescent spot can be examined, for example using a spectrometer, in order to perform a highly-selective material analysis of the desired target. Other applications include using the nanoplasma for nanoablation and/or nanodeposition processes.
|
申请公布号 |
US2005211910(A1) |
申请公布日期 |
2005.09.29 |
申请号 |
US20050907321 |
申请日期 |
2005.03.29 |
申请人 |
JMAR RESEARCH, INC. |
发明人 |
BLOOM SCOTT H.;RIEGER HARRY |
分类号 |
C23C16/18;C23C16/48;G01N23/207;G01N23/223;G01N23/227;H01S3/10;H05G2/00;(IPC1-7):H01S3/10 |
主分类号 |
C23C16/18 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|