Abtasteinheit für eine optische Positionsmeßeinrichtung,申请号DE19981055307-传众专利搜索

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发明名称	Abtasteinheit für eine optische Positionsmeßeinrichtung
摘要
申请公布号	DE19855307(B4)	申请公布日期	2005.09.29
申请号	DE19981055307	申请日期	1998.12.01
申请人	DR. JOHANNES HEIDENHAIN GMBH	发明人	MAYER, ELMAR J.;HOLZAPFEL, WOLFGANG;REICHHUBER, SIEGFRIED
分类号	G01D5/347;(IPC1-7):G01B11/00;G01B11/26;H01L21/60	主分类号	G01D5/347
代理机构		代理人
主权项
地址

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