| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric element in which a piezoelectric layer is highly densed, the layer has an excellent piezoelectric property, the layer is priorly orientated stably and with good reproductivity in a crystalline plane direction (100), and the X ray analysis strength thereof is improved; to provide a liquid injection apparatus comprising the same, and the method of manufacturing the same. <P>SOLUTION: A piezoelectric element 300 comprises a lower electrode 33, an upper electrode 44, and a piezoelectric layer 43 which is arranged between the lower electrode 33 and the upper electrode 44 with the crystalline plane direction priorly oriented to (100) and the particle diameter of 100 nm or less. A liquid injection apparatus comprises a pressure generation chamber 12 with the changeable volume according to the mechanical displacement of a piezoelectric actuator constituted by forming the piezoelectric element 300, a liquid injection head 220 comprising a nozzle orifice 21 for ejecting a liquid droplet in communication with the pressure generation chamber 12, and a driving device for driving the liquid injection head 220. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
