摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method of an electron emission source, a fluorescent display tube, and a flat display panel, wherein stable emission can be obtained. <P>SOLUTION: An excimer laser with energy density of 30 to 90 mJ/cm<SP>2</SP>and the half width at half maximum of 20 ns, is irradiated three times of frequency (20 Hz) interval on each irradiation region of the covering film 7 of a cathode 6, formed by thermal CVD method. As a result, CNT in the covering film 7 is cut, and the amount of end parts of the CNT as an emission site is increased, and the density of the CNT in the vicinity of its end parts is optimized. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |