| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a ceramic thin film capacitor not required for being exposed to an electrode at high temperature. SOLUTION: The method for manufacturing a ceramic thin film capacitor 1 has the step of exposing a non-sintered ceramic film 3 under laser irradiation to be sintered for forming a ceramic dielectric layer 2, and the ceramic thin film capacitor 1 has such a structure that the ceramic dielectric layer 2 is pinched between a pair of electrodes 4 and 5. More specifically, this method further comprises the steps of (A) coating a ceramic paste on a lower electrode 4, and next drying the coated paste, thereby forming the non-sintered ceramic film 3 on the lower electrode 4; (B) exposing the non-sintered ceramic film 3 under laser irradiation to be sintered for forming the ceramic dielectric layer 2; and (C) forming an upper electrode 5 on the ceramic dielectric layer 2. COPYRIGHT: (C)2005,JPO&NCIPI
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