| 摘要 |
PROBLEM TO BE SOLVED: To provide an ohmic electrode structural body which is resistant to a high temperature by obtaining synergistic effects of the reduction of current density inside a contact hole and effects of the improvement of EM (electromigration) durability in the material science, and by extremely suppressing a progress of the EM. SOLUTION: A contract hole 4 space opened to an insulating film 3 is filled with a conductor constituted of materials which are high in EM (electromigration) durability by an Al so that a "contact plug" can be configured, and an Al element diffusion blocking layer 8 is formed between the contact plug and the Al wiring, or the contact plug itself is formed with an Al element diffusion blocking function. COPYRIGHT: (C)2005,JPO&NCIPI
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