| 摘要 |
PROBLEM TO BE SOLVED: To provide a film thickness measuring device that can automatically perform reference sampling without a hand by applying a measurement system for detecting the reflected light of an object to be measured, as it is, to the measurement of a reference sample, and also can perform a continuous measurement for a long time under predetermined measurement precision even when an aging variation occurs in a measurement system that contains a light source. SOLUTION: A measurement probe 8 is moved to the measurement position of a reference sample 20a by controlling a linear slider 5 when the time of a time interval predetermined by a CPU 1 is passed, and reference sampling for storing spectral data that are output to a RAM 2 by a spectroscope is performed. The CPU 1 performs a film thickness measurement after calibration based on the amount of changes of the spectral data of the reference samples stored in the RAM 2. The time interval is determined by the CPU 1 based on a time interval or the precision of measurement that are input by a user. COPYRIGHT: (C)2005,JPO&NCIPI
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