| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface elastic wave device, having a comb-shaped electrode used as a gas sensor and enabling enhancement of sensitivity and precision and integration. SOLUTION: A propagation layer 1-2, which has a mesa end surface 1-7, serving as a surface elastic wave reflecting means and comprises high restance GaN oriented in a (0001) direction, is formed on a sapphire (0001) substrate 1-0, and two sets of interdigital electrodes 1-4 and 1-5 and a gas-adsorbing layer 1-6 for selectively adsorbing a specific gas molecule are formed on the propagation layer 1-2, to constitute the surface elastic wave device used as the gas sensor. COPYRIGHT: (C)2005,JPO&NCIPI
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