发明名称 Scale for reflective photoelectric encoder and reflective photoelectric encoder
摘要 In a scale for a reflective photoelectric encoder in which a reflective film is not formed on the side faces of phase gratings, an edge angle theta of the phase grating is set larger than 80 degrees and less than 90 degrees. Accordingly, stable diffraction efficiency is obtained, even if there are variations in the shape and size of the gratings.
申请公布号 US2005211887(A1) 申请公布日期 2005.09.29
申请号 US20050078355 申请日期 2005.03.14
申请人 MITUTOYO CORPORATION 发明人 KOJIMA KENICHI
分类号 G01D5/347;G01D5/38;G02B5/18;(IPC1-7):H01J40/14 主分类号 G01D5/347
代理机构 代理人
主权项
地址