发明名称 |
Method for making large-volume CaF2 single cystals with reduced scattering and improved laser stability, the crystals made by the method and uses thereof |
摘要 |
The method provides CaF<SUB>2 </SUB>single crystals with low scattering, small refractive index differences and few small angle grain boundaries, which can be tempered at elevated temperatures. In the method a CaF<SUB>2 </SUB>starting material is heat-treated for at least five hours at temperatures between 1000° C. and 1250° C. and then vaporized at a temperature of at least 1100° C. in a vacuum of at most 5*10<SUP>-4 </SUP>mbar to form a vapor. The vapor is condensed at a temperature between 500° C. to 1280° C. to form a condensate. Then a melt formed from the condensate is cooled in a controlled manner to obtain the single crystal, which is subsequently tempered. The method is preferably performed with a CaF<SUB>2 </SUB>starting material including waste material and cuttings from previously used melts.
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申请公布号 |
US2005211160(A1) |
申请公布日期 |
2005.09.29 |
申请号 |
US20050063147 |
申请日期 |
2005.02.22 |
申请人 |
ORTMANN LARS;KANDLER JOERG;MENZEL ANDREAS;MUELLER MATTHIAS;PARTHIER LUTZ;GOENNA GORDON V D |
发明人 |
ORTMANN LARS;KANDLER JOERG;MENZEL ANDREAS;MUELLER MATTHIAS;PARTHIER LUTZ;GOENNA GORDON V.D. |
分类号 |
G03F1/14;C30B11/00;C30B29/12;G02B1/02;G02B5/30;G03F7/20;H01L21/027;(IPC1-7):C30B1/00;C30B9/00;C30B28/06 |
主分类号 |
G03F1/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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