| 摘要 |
A circuit element that can be used, for example, in a spatial light modulator to photolithographically transfer an image onto a substrate, includes a strobe buffer connected between a strobe line and at least two associated circuit elements to buffer the strobe signal on the strobe line and provide a buffered strobe signal to the associated circuit elements. The strobe line is electrically coupled to a set of the circuit elements to provide a strobe signal thereto. The strobe signal causes the circuit elements in the set to shift data to additional circuit elements outside of the set. The circuit elements are alterable in response to data stored therein.
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