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发明名称
Drehantriebsvorrichtung und -verfahren
摘要
申请公布号
DE10393212(T5)
申请公布日期
2005.09.29
申请号
DE20031093212T
申请日期
2003.09.12
申请人
TOKYO ELECTRON LTD., TOKIO/TOKYO
发明人
SATO, HIDEAKI
分类号
H02P27/00;(IPC1-7):H02P5/00
主分类号
H02P27/00
代理机构
代理人
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