| 摘要 |
PROBLEM TO BE SOLVED: To solve the problems that the connection structure between a probe device side and a tester side, which has been proposed in a conventional example, cannot adapt to a plurality of types of probe cards having different diameters; and that, while the currently-used probe device can adapt to probe cards having a diameter up to 350 mm, since the probe cards are increased in size recently, the currently-used probe device, like the connection structure proposed in the conventional example, is adaptable to a plurality of types of testers, but cannot adapt to probe cards increased in size and the plurality of types of probe cards. SOLUTION: A probe device 10 according to the present invention comprises a pogo ring 15 exclusively used for the plurality of types of testers, an insert ring 14 adaptable to a probe cart 17 and a base card holder 13 which is formed to have a larger diameter than that of a card holder 20 exclusively used for the probe card 17, and a conversion ring 16 which relays the connection between the card holder 20 and the base card holder 13 when this base card holder 13 is attached to the probe card 17. COPYRIGHT: (C)2005,JPO&NCIPI
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