| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic gate valve having corrosion resistance, enabling baking at high temperature, reducing generation of particles and discharge gas, having less gas adsorption, and having a long life, by solving a problem of a conventional gate valve made of stainless metal used for a semiconductor manufacturing device and the problem caused by forming the gate valve into a ceramic. SOLUTION: The gate valve 1 comprises a valve body and a housing. The ceramic gate valve in which at least the valve body 3 and a part of a valve seat 4 of the housing in contact with the valve body 3 are constituted of ceramics is provided. COPYRIGHT: (C)2005,JPO&NCIPI
|
