| 摘要 |
PROBLEM TO BE SOLVED: To provide a structure of a new electrostatic chuck that has high attraction power and uniform attraction across its surface. SOLUTION: A rib is formed at a rear face of a dielectric ceramics that breaks up the rear face into multiple independent closed partitions, and an electrode film for the electrostatic chuck is formed at a concave underside surrounded by the rib. Further, a ceramic plate that has an equivalent linear expansion coefficient as that of the dielectric ceramics or the same material is embedded in the concave part surrounded by the rib so that the inner surface of the rib surrounding the concave part and the edge periphery of the ceramic plate, and the underside of the ceramic plate and the concave underside surrounded by the rib are brazed such that the underside of the ceramic plate and the brazed layer of the concave underside become the electrode film of the electrostatic chuck. COPYRIGHT: (C)2005,JPO&NCIPI |
