| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a microplasma jet generator capable of excellently producing stable microplasma jet by small electric power in a very small space under the atmospheric pressure. <P>SOLUTION: This microplasma jet generator to produce inductively coupled microplasma jet driven by a high frequency power supply in a VHF band has a substrate 1 is equipped with micro antennas 2a, 2b, 2c, a discharge tube 3 installed in the vicinity of the micro antennas, and the micro antenna has a wavy shape of a plurality of rolls. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
