| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for producing a solid vessel having high productivity where plasma treatment can be efficiently performed to a solid vessel having an opening hole under the pressure in the proximity of the atmospheric pressure in a short time, and to provide a production device therefor. <P>SOLUTION: The method for producing a solid vessel comprises: a stage wherein an electrode and a counter electrode in which at least either is coated with a dielectric layer are installed at the inside and outside of a solid vessel having an opening hole; a stage wherein gas at least including a gaseous starting material and discharge gas is fed, so as to be contacted with the inside of the vessel; and a stage wherein alternating voltage is applied to either of the counter electrode to generate plasma, thus plasma treatment is performed to the inside of the vessel. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
