| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card capable of securing a prescribed contact pressure required for electric conduction between a probe and an electrode which is a measuring object even when the probe is miniaturized. SOLUTION: This probe card A is a sensing part of an unillustrated measuring device of the measuring object B, and is held by a prober of the measuring device. The probe card A is equipped with a support substrate 100 arranged oppositely to the measuring object B; a plurality of semicircular arc-shaped probes 200 formed on the surface of the support substrate 100; and a reinforcing plate 300 which is an approximately quarter arc-shaped member provided on the support substrate 100, positioned between the probe disposing surface of the support substrate 100 and the opposite surface of the top of the probe 200. COPYRIGHT: (C)2005,JPO&NCIPI
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