| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a surface acoustic wave filter by which a pyroelectric countermeasure of a piezoelectric substrate can be realized with few processes. SOLUTION: The method for manufacturing a surface acoustic wave filter is provided with a process for forming a first layer electrode pattern including an excitation electrode 21 and a reflecting electrode 17, which are respectively electrically independent, on the piezoelectric substrate 10 having a resistivity of≥1.0×10<SP>7</SP>Ωcm and≤1.0×10<SP>13</SP>Ωcm, a process for forming a resist mask 40a by applying a photoresist 40 on the piezoelectric substrate, to which the first layer electrode pattern is formed, and by executing exposure and development, a process for forming conductive films 43, 44 on the piezoelectric substrate 10, to which the resist mask 40a is formed, and forming a second layer electrode pattern 43 via the resist mask 40a, and a process for peeling off the resist mask 40a and the conductive film 44 formed on the resist mask 40a. COPYRIGHT: (C)2005,JPO&NCIPI
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