| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of arbitrarily changing an image position and a magnification to correct the deviation between the image and target positions, in the direction of the optical axis (Z-direction). SOLUTION: In the particle-optical projection device (32), a pattern (B) is depicted on a target tp by energy-property charged particles. This pattern is made to emerge as a patterned beam pb of the charged particles, that emerge from a surface of a material body via at least one crossover c and is focused into an image S having a given magnitude and distortions. In order to correct the deviation in the Z-direction of the image S position from an actual position of the target tp, without changing the magnitude of the image S, the present projection device is provided with a position-detecting means ZD for measuring the Z positions of the target tp at several points and a control means 33 for calculating a correction value cr of a selected lens parameter of the particle-optical lens L2, arranged at the last stage and controlling the lens parameter, in accordance with the connection value. COPYRIGHT: (C)2005,JPO&NCIPI
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