发明名称 |
IMAGE DATA TRANSFERRING METHOD, IMAGE PROCESSOR AND WAFER APPEARANCE INSPECTING DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide an image processor and a wafer appearance inspecting device by an image transferring method for preventing the impossibility of processing from being generated in the divided regions of image data. SOLUTION: A line counter segmentation value and segmentation width are set in an image dividing/distributing circuit 104 for continuous image data to be inputted synchronously with an image synchronizing signal, and the image data are stored so that their divided regions can be overlapped in each image distribution memory 106, and the divided images of the each memory are distributed to each processor part 107. The image data are distributed to each processor part while an overlap region 103 is included in an inspection block 102. It is possible to flexibly cope with the overlap region according to the setting of a line counter segmentation table 108. COPYRIGHT: (C)2005,JPO&NCIPI
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申请公布号 |
JP2005266910(A) |
申请公布日期 |
2005.09.29 |
申请号 |
JP20040074571 |
申请日期 |
2004.03.16 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORP |
发明人 |
ICHIGE ATSUSHI;MOMIYAMA YOSHIYUKI;NAKANO MICHIO;TANAKA SHIGEYA;FUJISAWA TAKAKO;HAYASHI KAZUYA;KAWASHIMA ICHIRO;FUJII MASARU;KAWAKI KOJI |
分类号 |
H01L21/66;G06F15/80;G06T1/60;(IPC1-7):G06T1/60 |
主分类号 |
H01L21/66 |
代理机构 |
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