PRESSURE SENSOR

摘要

PROBLEM TO BE SOLVED: To improve measurement accuracy with a large electrostatic capacitance and facilitate wiring. SOLUTION: A capacitor film 11 is formed by providing both surfaces of an elastic dielectric film 12 with electrode layers 13 and 14 by vapor deposition or printing and folded up into concertinas. Electric wires 15 are connected to one end parts of the electrode layers 13 and 14 at an upper end part of the capacitor film 11. Push-in plates 16 are arranged on both upper and lower sides of a folded structure of the capacitor film 11. By forming an equivalent circuit similar to parallel-connected plate capacitors via the electrode layers 13 and 14 vertically connected to one another in (the trough side of) continuous and folded parts by each layer of the folded and layered capacitor film 11 and substantially enlarging the electrostatic capacitance of the whole capacitor film 11 according to its number of times of folding, relative changes in the electrostatic capacitance when a load acts between the push-in plates 16 is enlarged. COPYRIGHT: (C)2005,JPO&NCIPI