发明名称 METHOD FOR FORMING PHOTORESIST LAYER ON SUBSRTATE AND BUMPING PROCESS USING THE SAME
摘要 A method for forming a photoresist layer on a substrate to improve the joining of the photoresist layer and the substrate is provided. For a bumping process using the method, a liquid is used to react with the photoresist layer to form a combination layer of good fluidity between the photoresist layer and the passivation layer on the substrate. The combination layer fills the pits of the passivation layer to improve the joining of the photoresist layer and the passivation layer. Therefore, when the solder material is filled into the openings, no solder material stays between the photoresist layer and the passivation layer, so as to avoid solder bridging between the two adjacent pads.
申请公布号 US2005215044(A1) 申请公布日期 2005.09.29
申请号 US20050907156 申请日期 2005.03.23
申请人 发明人 HUANG MIN-LUNG
分类号 H01L21/44;H01L21/469;H01L21/60;H01L23/18;H01L23/485;(IPC1-7):H01L21/44 主分类号 H01L21/44
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