| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma generator for eliminating heat and derivatives which drive when forming discharge plasma and operating at a high repetitive rate by providing a capillary having a taper extending to the direction that operation gas moves in a discharge portion, and accelerating the operation gas and controlling the density distribution while eliminating the plasma at every operation. <P>SOLUTION: This plasma generator includes a pair of discharge electrodes 21 and 22 connected to a discharge power supply and receiving a repetitive pulse voltage during the connection, wherein the operation gas is provided in the direction that the pair of electrodes are disposed, an operation gas guide capillary 25 is provided between the pair of electrodes, and the capillary has a taper extending to the direction that operation gas moves. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
