LIGHT IRRADIATION APPARATUS AND METHOD, CRYSTALLIZATION DEVICE AND METHOD, DEVICE, AND LIGHT MODULATION ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a crystallization apparatus which can stably form a desired V-shaped light intensity distribution and can almost uniformly produce crystal grains on a semiconductor film. SOLUTION: The crystallization apparatus includes a light modulation element (1) to modulate a phase of an incident light flux and an imaging optical system (3) to form the V-shaped light intensity distribution on a predetermined surface on the basis of the light flux through the light modulation element. The light modulation element has a complex amplitude transmittance distribution in which a quadratic differential value of a phase value of the complex amplitude distribution becomes almost zero on the bottom portion of the V-shaped light intensity distribution in the image space of the imaging optical system. The complex amplitude transmittance distribution of the light modulation element has a phase modulation no less than a point image distribution range of the imaging optical system. COPYRIGHT: (C)2005,JPO&NCIPI