| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect detection device capable of detecting accurately a low-contrast defect. SOLUTION: This defect detection device is equipped with an image data generation means 2 for generating image data of an inspection object by imaging the inspection object, and an image processing means 4 for detecting a defect on the surface of the inspection object by processing the image data based on a pixel concentration value. The image processing means calculates an integrated value by integrating each pixel concentration value in a defect detection block constituted by the plurality of adjacent pixels, and compares the integrated value with a prescribed threshold, to thereby detect a defect. The defect detection block is set so as to be partially overlapped with an adjacent defect detection block. COPYRIGHT: (C)2005,JPO&NCIPI
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