Pressure sensor, method of producing the sensor, and in-cylinder pressure detection structure of internal combustion engine

摘要

In a pressure sensor A according to the presenting invention, a piezoelectric element B formed by a thin film of aluminium nitride is mounted on a base material C of an insulating material, and output electrodes D and E and output lead wires F and G which transmit a signal detected by the piezoelectric element B are mounted on the side of the base material C. The pressure sensor A is directly mounted on a cylinder head e of an internal combustion engine, or is mounted on the outer surface of a heater L which is secured at the free end of a glow plug K, whereby it is disposed to face a combustion chamber h. A combustion pressure or oscillations during the operation of the engine can be detected with a high sensitivity.