| 摘要 |
A reticle stocking and sorting system. The reticle management system comprises first reticle storage, second reticle storage, third reticle storage, and a host system. The first reticle storage stores a first reticle currently in use. The second reticle storage stores a second reticle not currently in use. The third reticle storage stores a third unused reticle temporarily before it is disposed of. The host system is adapted to rearrange the first, second, and third reticles among the first, second, and third reticle storages, based on demand data pertaining to a product requiring least one article during fabrication.
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