发明名称 |
Method for manufacturing a polycrystalline semiconductor film, apparatus thereof, and image display panel |
摘要 |
The generation of a projecting intensity distribution in an irradiation laser beam used for forming a polycrystalline semiconductor film is prevented by irradiating the laser beam onto an amorphous semiconductor film to crystallize it while it is being scanned. A dog-ear removing filter for eliminating diffracted light that occurs at boundaries of lenses and acts as a cause of development of dog-ears in the light intensity distribution is disposed in an optical system to cause the light intensity distribution in the irradiation laser beam to be uniform. As a result, by removing the dog ear distributions, the necessity for making the light intensity distribution of the laser beam blur is eliminated, and, consequently, a distribution of high energy efficiency can be maintained and the throughput is improved.
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申请公布号 |
US2005215077(A1) |
申请公布日期 |
2005.09.29 |
申请号 |
US20050028864 |
申请日期 |
2005.01.05 |
申请人 |
TAKEDA KAZUO;SATO TAKESHI;GOTOH JUN;SAITOU MASAKAZU;MUTOU DAISUKE |
发明人 |
TAKEDA KAZUO;SATO TAKESHI;GOTOH JUN;SAITOU MASAKAZU;MUTOU DAISUKE |
分类号 |
G02F1/1368;G02F1/133;G09F9/30;G09G3/36;G09G3/38;H01L21/00;H01L21/20;H01L21/26;H01L21/263;H01L21/268;H01L21/336;H01L21/42;H01L21/77;H01L27/32;H01L29/786;(IPC1-7):H01L21/26 |
主分类号 |
G02F1/1368 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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