SYSTEM AND METHOD FOR REMOVAL OF MATERIALS FROM AN ARTICLE

摘要

The system and method of the present invention removes organic and organometallic materials from an article in reduced pressure atmosphere containing ozone and activated oxygen. A dielectric barrier discharge lamp induces an intermolecular molecule energy transfert to the organic and organometallic material. The dielectric barrier discharge lamp emits vacuum ultaviolet rays having a wavelength of about 172 nm that produce a photochemical reaction with the oxygen-containing gas to generate ozone and the activated oxygen. The organic and organometallic material is then attached by the ozone and activated oxygen.