| 发明名称 |
MICRO ELECTROMECHANICAL SYSTEMS FOR DELIVERING HIGH PURITY FLUIDS IN A CHEMICAL DELIVERY SYSTEM |
| 摘要 |
<p>Complex fluidic micro electromechanical systems (MEMS) are incorporated into high purity chemical delivery systems, while maintaining valve sealing integrity, quality and performance of the system. In particular, fluidic MEMS systems are incorporated into high purity chemical delivery systems for semiconductor fabrication processes.</p> |
| 申请公布号 |
EP1578546(A2) |
申请公布日期 |
2005.09.28 |
| 申请号 |
EP20030780478 |
申请日期 |
2003.12.19 |
| 申请人 |
L'AIR LIQUIDE, SOCIETE ANONYME A DIRECTOIRE ET CONSEIL DE SURVEILLANCE POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES G. CLAUDE |
发明人 |
ZNAMENSKY, DMITRY;ZDUNEK, ALAN, D. |
| 分类号 |
B01J4/02;B01J19/00;B01L3/02;(IPC1-7):B21B1/00 |
主分类号 |
B01J4/02 |
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