发明名称 Semiconductor wafer, method of manufacturing the same, and method of manufacturing a semiconductor device
摘要 <p>In a semiconductor wafer including a plurality of element forming regions formed on a front surface of a semiconductor substrate, a scribe line groove is formed along a periphery of the each of the element forming regions, and stoppers are located at an intersection of the scribe line groove, so as to block the scribe line groove.</p>
申请公布号 EP1580806(A2) 申请公布日期 2005.09.28
申请号 EP20040029452 申请日期 2004.12.13
申请人 NEC ELECTRONICS CORPORATION 发明人 ONUMA, MANABU
分类号 G03F1/00;G03F1/70;H01L21/301;H01L21/78;(IPC1-7):H01L21/78 主分类号 G03F1/00
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